摘要为了提高光学玻璃元器件的整体加工效率，提出了将旋转超声端面铣削（ＲＵＦＭ）工艺方法应用于光学玻璃的平面加工。通过分析ＲＵＦＭ金刚石磨粒运动学、动力学特性，结合脆性材料压痕断裂力学理论及材料去除特性，建立了脆性材料ＲＵＦＭ去除模型。在此基础上，开展了ＲＵＦＭ和普通加工光学玻璃的对比试验。扫描电子显微镜（ＳＥＭ）观察两种加工方式的表面形貌显示：ＲＵＦＭ以较小且均匀的贝壳状碎屑完成材料去除，具有较小的径向裂纹和侧向裂纹尺寸。亚表面损伤磁流变抛光斑点检测的结果表明：与普通加工相比，ＲＵＦＭ可以有效降低光学玻璃加工亚表面损伤深度。理论和试验研究表明，ＲＵＦＭ工艺方法是光学玻璃等脆性材料的有效加工方法。关键词：旋转超声加工；端面铣削；光学玻璃；表面形貌；亚表面损伤第I页AbstractInordertoimprovetheoverallprocessingefficiencyofopticalglasscomponents,theprocessofrotatingultrasonicfacemilling(RUFM)processtoopticalglassisproposed.ByanalyzingthekinematicsanddynamicscharacteristicsRUFMdiamondgrits,combiningthetheoryofbrittlematerialindentationfracturemechanicsandmaterialremovalcharacteristicsofbrittlematerialRUFMremovalmodelisestablished.Onthisbasis,thecomparisontestofRUFMandnormalprocessingopticalglassiscarriedout.Scanningelectronmicroscope(SEM)observation,accordingtotwokindsofprocessingmethodsofsurfacemorphologyRUFMsmallanduniformshelldebristocompletethematerialremoval,withsmallerradialcrackandlateralcracksize.TheresultsshowthatRUFMcanreducethesurfacedamagedepthofopticalglass,comparedwithnormalprocessing.ThetheoreticalandexperimentalresearchshowsthattheRUFMprocessisaneffectivemethodfortheprocessingofbrittlematerialssuchasopticalglass.KeyWords:Rotaryultrasonicmachining;Facemilling;Opticalglass;Surfacetopography;Subsurfacedamage第II页目录摘要........................................................................................................................IAbstract.....................................................................................................................II1.1课题的目的和意义......................................................................................41.1.1课题的目的........................................................................................41.1.2课题的意义........................................................................................41.2课题背景......................................................................................................42BUFM材料去除模型的建立................................................................................62.1RUFM金刚石磨粒运动学、动力学特性.................................................62.2ＲＵＦＭ材料去除模型建立......................................................................83.1试验条件......................................................................................................93.2表面特征检测方法....................................................................................10参考文献.................................................................................................................13第III页1.1课题的目的和意义1.1.1课题的目的对于光学玻璃元器件的加工，除要求满足机械尺寸精度外，还需保证零件必要的光学功能特性。已有的研究表明，由于光学玻璃硬度高、脆性大、断裂韧性低的固有特性，传统成型加工方法均会产生较严重的表面、亚表面损伤，从而降低了光学零件的强度、长期稳定性、成像质量、镀膜质量和抗激光损伤阈值等重要性能指标［１－３］。为了去除光学零件加工表面、亚表面...
