1. MMF Multi Media Filter多介质过滤器2 AC Active Carbon 活性炭过滤器3 WC Weak Cation 弱阳树脂塔4 2B Cation and Anion 阳床，阴床5 DG Degasifier 脱气塔6 RO Reverse Osmosis 反渗透过滤7 MB Mixed Bed 混床8 MDG Membrane Degasifier 膜脱气9 UV Ultraviolate Desinfector 紫外线杀菌机10 TOC-UV TOC Ultravoilate Desinfector 紫外线除TOC 杀菌机11 UF Ultrafilter 超过滤12 PAC Poly Alumina Chlorine 聚合氯化铝13 DO Dissoved Oxygen 溶解氧14 TOC Total Organic Carbon 总有机碳15 DI Deionization 去除离子16 SC Strong Cation 强阳树脂塔17 WA/SA Weak Anion / Strong Anion 弱阴/ 强阴树脂塔18 SDI Silt Density Index 污染密度指数19 TUB Turbidity 浊度20 RO CONC. RO Concentration Water RO 浓缩水21 RO PERMEATE RO Permeate Water RO 产水22 SS Suspendid Solid matter 悬浮物质23 COD Chemical Oxygen Demand 化学需氧量24 BOD Biological Oxygen Demand 生物需氧量25 CMP Chemical Mechanical Polisher 化学机械研磨26 BG Backside Grinding 晶背研磨27 SF Sand filter 石英砂过滤器28 FA Fluoride Absorber 氟离子吸收塔29 AA Active Al2O3 活性Al2O3 30 LSC Local Solvent Collection Cabinet 现场溶剂收集槽31 PAM Polyaerylamide(Polymer) 聚丙烯酰胺40 DWWA Acid/Caustic waste water drain piping 一般酸碱排放管路41 DCHF concentrate hydrofluoric acid 浓氢氟酸排放管路42 DDHF dilute hydrofluoric acid 稀氢氟酸排放管路43 DB/GW backside grounding water 晶背研磨排放管路44 DFRW-Cu first rinse water in Copper line 铜制程初道冲洗水排放管路45 DLRW last rinse water 后道冲洗水排放管路46 DCMP-clean Chemical mechanical polish clean water 化学机械抛光废水排放管路47 DF-FAB floor drain in FAB 地板排水排放管路48 DIPA IPA 异丙醇排放管路49 Dsolvent-1 solvent-1 有机溶剂-1 排放管路50 PDS Process drain sys. 制程排水系统52 DH2SO4-Cu Cu line Sulphuric acid drain 铜制程初硫酸废液排放管路53 DH2 SO4 Sulphric acid drain 硫酸废液排放管路54 DH3PO4 Phosphoric acid drain 磷酸废液排放管路55 PVC Polyvinyl Chloride 聚氯乙烯56 CPVC Chlorinated Polyvinyl Chloride 氯化聚氯乙烯57 PE Polyethylene 聚乙烯58 PP Polypropylene (Homopolymer) 聚丙烯59 PTFE Polytetrafluorethylene 聚四氟乙烯60 PVDF (KYNAR) Polyvinylidene Fluoride 聚偏二氟乙烯61 DW Domestic Water 生活用水62 PW Process water 生产用水63 DWW Domestic Warm Water 生活温水64 MW Middle Water 中水65 RWRS Rain Water Reuse System 雨水回收系统66 IWWS Industrial Waste Water System 工业污废水排水系统67 EEW Emergency Eye Washer 紧急冲身洗眼器69 HEPA High Efficiency Particulate Air Filter 高效过滤器11 H2SO4 Sulfuric Acid 硫酸12 HCL Hydrochloric Acid 盐酸13 HNO3 Nitric Acid 硝酸14 H3PO4 Phosphoric Acid 磷酸15 HF Hydrofluoric acid 氢氟酸16 H2O2 Hydrogen Peroxide 过氧化氢（双氧水）17 IPA 2-Propanol 异丙醇19 NH4OH Ammonia (liquid ) 氨水25 VMB Valve Manifold Box 阀箱
