MMF Multi Media Filter多介质过滤器2 AC Active Carbon 活性炭过滤器3 WC Weak Cation 弱阳树脂塔4 2B Cation and Anion 阳床,阴床5 DG Degasifier 脱气塔6 RO Reverse Osmosis 反渗透过滤7 MB Mixed Bed 混床8 MDG Membrane Degasifier 膜脱气9 UV Ultraviolate Desinfector 紫外线杀菌机10 TOC-UV TOC Ultravoilate Desinfector 紫外线除TOC 杀菌机11 UF Ultrafilter 超过滤12 PAC Poly Alumina Chlorine 聚合氯化铝13 DO Dissoved Oxygen 溶解氧14 TOC Total Organic Carbon 总有机碳15 DI Deionization 去除离子16 SC Strong Cation 强阳树脂塔17 WA/SA Weak Anion / Strong Anion 弱阴/ 强阴树脂塔18 SDI Silt Density Index 污染密度指数19 TUB Turbidity 浊度20 RO CONC
RO Concentration Water RO 浓缩水21 RO PERMEATE RO Permeate Water RO 产水22 SS Suspendid Solid matter 悬浮物质23 COD Chemical Oxygen Demand 化学需氧量24 BOD Biological Oxygen Demand 生物需氧量25 CMP Chemical Mechanical Polisher 化学机械研磨26 BG Backside Grinding 晶背研磨27 SF San