FurnaceVIP专享

Furnace Reference Manual Tempress Systems Inc. Furnace manual M320_01 January 2004 This page intentionally left blank TABLE OF CONTENTS Table of contents 1. Introdu ction.......................................................... 1-1 1.1 Scope of the manual................................................................. 1-1 1.2 Furnace models........................................................................ 1-1 2. Description........................................................... 2-1 2.1 Diffusion system........................................................................ 2-1 2.2 Components of the furnace....................................................... 2-3 2.3 Furnace cabinet........................................................................ 2-4 2.4 Scavenger................................................................................. 2-4 2.4.1 Available models........................................................ 2-4 2.4.2 Description of the Scavenger..................................... 2-4 2.5 Cooling unit............................................................................... 2-5 2.6 Fast Cooldown.......................................................................... 2-6 2.7 Heating elements (disposacore)............................................... 2-7 2.7.1 Tube heating module................................................. 2-7 2.7.2 Heating elements, tube adapters, isolation collars .... 2-8 2.8 Support and sealing................................................................ 2-10 2.9 Furnace temperature control................................................... 2-11 3. Installation............................................................ 3-1 3.1 Introduction............................................................................... 3-1 3.2 Unpacking..................................................