液氮洗岗位操作规程编制：XXX审核：XXX批准：XXX净化车间二零一二年五月目录第一部分生产工艺介绍............................................................................................................6一、工艺原理..........................................................................................................................61.吸附原理......................................................................................................................62.混合制冷原理..............................................................................................................73.液氮洗涤原理..............................................................................................................7二、工艺特点..........................................................................................................................8三、生产工艺流程叙述...........................................................................................................91.净化气流程（包括合成气流程）...............................................................................92.高压氮气流程.............................................................................................................113.燃料气流程.................................................................................................................114.循环氢气流程............................................................................................................125.空分来的补充液氮流程.............................................................................................126.分子筛吸附器再生流程.............................................................................................127.冷箱低温液体排放（各导淋排放）.........................................................................13第二部分技术操作规程...........................................................................................................14一、岗位任务........................................................................................................................14二、岗位设备........................................................................................................................14三、开停车操作规程............................................................................................................17（一）原始开车操作规程.....................................................................................................171、开车前的准备工作...................................................................................................171.1管线的吹扫......................................................................................................171.2分子筛的装填.................................................................................................191.3气密试验.........................................................................................................201.4系统干燥置换..................................................................................................221.5系统裸冷..........................................................................................................241.6珠光砂的装填..................................................................................................282、开车步骤..................................................
