S econdary proce s s s yst em i nt r o du c t i onW o rking chara c te ri s t ic sﻫ1、 Wafer factory2、 Fab features and c apabili ti es o f t he g a s r eq u ired3、 Chemic a l substa n ces a n d the i r prope rt ie s requ i re d f or fa b4、 W o rk cont e ntsﻫ1、 W a fer fac t o r yFAB is a mode rn plant produci ng ch i ps, th e m a in workplace f o r th e c l e an r oo m、 C l ean room i s a co n stant t e m pe ra tu r e and humidit y, tem p eratur e i s 21 ° c、 R elative h u m i dity 65%、 Fab c l ea n ro oms d ivided int o the d i ff u sio n zo n e (fur n a c e batc h), ye llo w, e tch ing, t hi n f ilm ar eas、 2、 F ab fe atu res and functi o n a l i ty o f t h e g a s requiredﻫDu e to the manufac tu r i ng pr o cess o n the n e ed and us e of m a ny kin ds of gases in semiconduc t or fa c t