南开大学 硅光电子学与储能实验室Four-Point Probe Operation ｜ 2025四探针操作手册四探针操作说明书Four-Point Probe Operation第 1 章引言..............................................................................................................................11.目的..................................................................................................................................12。 应用范围..........................................................................................................................13.测试设备..........................................................................................................................1四探针......................................................................................................................1数字电压源表..........................................................................................................2第 2 章原理简述......................................................................................................................31.薄膜(厚度≤4mm）电阻率：.........................................................................................32.薄膜方块电阻..................................................................................................................3第 3 章操作方法......................................................................................................................51。 引言..................................................................................................................................52。 测试线连接方式..............................................................................................................53.KEITHLEY 2400 高压源表设置指南..................................................................................64。 探针接触方式..................................................................................................................85.数据测试指南............................
