創新誠信簡樸114/01/01Page:1三福化工特殊化學品事業部化學品簡介1.Developer(顯影液)•TMAH(氫氧化四甲基銨)•KOH(氫氧化鉀)•NaOH(氫氧化鈉)•Na2CO3(碳酸鈉)2.Etchant(蝕刻液)•Oxalicacid(草酸)•H3PO4(磷酸)•HNO3(硝酸)•Aceticacid(醋酸)•HF(氫氟酸)3.Stripper(光阻剝離劑)•DMSO(二甲基亞碸)•BDG(二乙二醇單丁醚)•MEA(DEA&TEA)(單乙醇胺)•NMP(氮-甲基四氫吡咯酮)•HA(羥胺)4.Thinner&EBR(光阻稀釋劑與洗邊劑)•PGME(丙二醇單甲醚)•PGMEA(丙二醇單甲醚醋酸酯)•ANONE(環己酮)•NBAC(醋酸丁酯)創新誠信簡樸114/01/01Page:2半導體製程簡介基板基板(玻璃或矽晶圓)金屬薄膜金屬化(濺鍍或沉積等)光阻(PR)塗佈光阻光罩曝光創新誠信簡樸114/01/01Page:3半導體製程簡介基板金屬薄膜顯影蝕刻去光阻創新誠信簡樸114/01/01Page:41.Developer(顯影液)用途•利用鹼性顯影液將光阻(PR,PhotoResist)經曝光後形成的有機酸中和、剝落，留下未反應的光阻圖案。主要成分•※TMAH•KOH•NaOH•Na2CO3創新誠信簡樸114/01/01Page:51-1.25%TMAH中文名稱：25%氫氧化四甲基銨英文名稱：25%Tetramethylammoniumhydroxide危害性/毒性等級：強鹼性(第八類腐蝕性物質)/具急毒性LD50oralrat：50mg/kg物理性質•分子式/結構式：C4H13NO/(CH3)4NOH•分子量：91.15(g/mole)•熔點：---•沸點：∼100℃•閃火點：---•自然溫度：---•爆炸界限：---•比重：1.02•溶解度(H2O/20℃)：全溶•pH值：>13(強鹼性)•CASNo.：75-59-2•UN：1835•別名：TMAH創新誠信簡樸114/01/01Page:6CH3H3CCH3NTMA＋H3COOCH3CODMC1.6MPa,130℃Methanol＋CO2－OCH3＋＋H2O－MethanolCH3H3CCH3NCH3＋CH3H3CCH3NCH3CH3H3CCH3NCH3＋CH3H3CCH3NCH3－HCO3TMAC反應水解TMAH生產方法(1)創新誠信簡樸114/01/01Page:7CH3H3CCH3NCH3＋CH3H3CCH3NCH3－HCO3TMACO2CO2H2O陽極陰極CH3H3CCH3NCH3＋CH3H3CCH3NCH3－HCO3CH3H3CCH3NCH3＋CH3H3CCH3NCH3－OHH2OH2離子膜TMAH電解TMAH生產方法(2)創新誠信簡樸114/01/01Page:8全球各廠TMAH產能排名公司名稱(/)產能噸年1美國Sachem25,0002日本Tama20,0003台灣長春石化9,6004大陸格林達9,0005日本Tokuyama5,0006日本昭和電工3,0007韓國三星化學2,000創新誠信簡樸114/01/01Page:9台灣TMAH進口量與價格(歷年)歷年TMAH進口數量與價格02,0004,0006,0008,00010,00012,00014,00016,00018,00019961997199819992000200120022003200420052006年度進口數量(MT)0102030405060708090100進口價格(NTD/kg)進口數量(MT)進口價格(NTD/kg)年度進口數量(MT)進口價格(NTD/kg)19968667819971,3377519981,5448919991,7569220003,8898720015,1758420026,1187320036,1357120048,68964200510,80762200615,75958創新誠信簡樸114/01/01Page:10台灣TMAH進口量與價格(各國)95年度重量(kg)價值(仟元)平均單價重量(kg)價值(仟元)平均單價重量(kg)價值(仟元)平均單價重量(kg)價值(仟元)平均單價1月577,06033,92358.79283,03916,50958.3335,40083223.5056,1603,17356.502月683,34439,38857.64258,86016,29562.9500#DIV/0!19,0301,07056.233月691,15641,45459.98324,06318,68257.6561,9053,71960.0837,8902,13356.294月830,22150,23760.51131,0107,27855.55149,1858,27855.4938,0902,14156.215月551,96733,75061.14246,19914,13557.41124,2106,43051.77128,4506,71352.266月586,68135,49660.50304,77917,72558.16124,0054,92439.7157,2103,35758.687月830,88749,32759.37435,50925,05757.53348,59017,82251.1376,3104,35057.008月599,32934,94858.31281,35816,79659.70282,13013,99349.60117,6306,42354.609月891,98650,82456.98329,94520,34361.66154,0008,28453.7976,4104,35256.9610月1,307,39074,15856.72320,98919,89961.99199,58010,12950.75171,2909,49055.4011月1,039,12357,42355.26162,21911,02767.98305,91012,52640.95170,5409,24054.1812月701,70038,98855.56129,9358,10262.35187,4009,45650.46168,4808,91952.94合計9,290,844539,91658.113,207,905191,84859.801,972,31596,39348.871,117,49061,3615...
