镀膜真空术语全集 1
一般术语 1-1
压力计pressure gauge: 1-2
真空计vacuum gauge: ⑴
规头(规管)gauge head: ⑵
裸规 nude gauge : ⑶
真空计控制单元 gauge control unit : ⑷
真空计指示单元 gauge indicating unit : 2
真空计一般分类 2-1
压差式真空计differential vacuum gauge: 2-2
绝对真空计 absolute vacuum gauge: 2-3
全压真空计total pressure vacuum gauge: 2-4
分压真空计;分压分析器 partial pressure vacuum gauge; partial pressure analyser: 2-5
相对真空计relative vacuum gauge : 3
真空计特性 3-1
真空计测量范围 pressure range of vacuum gauge: 3-2
灵敏度系数 sensitivity coefficient: 3-4
电离规系数(压力单位倒数)ionization gauge coefficient (in inverse pressure units): 3-5
规管光电流 photon current of vacuum gauge head: 3-6
等效氮压力equivalent nitrogen pressure : 3-7
X 射线极限值 X-ray limit: 3-8
逆 X 射线效应 anti X-ray effect: 3-9
布利尔斯效应 blears effect: 4
全压真空计 4-1
液位压力计liquid level manometer: 4-2
弹性元件真空计elastic element vacuum gaug