压电薄膜研究进展目录摘 要......................................................IAbstract..................................................II1.前言.....................................................11.1 压电效应与压电材料...........................................11.2 压电薄膜概述.................................................21.2.1 压电薄膜的发展背景及研究意义............................21.2.2 压电薄膜特性参数........................................22.压电薄膜研究进展.........................................32.1 压电薄膜制备方法.............................................32.1.1 AlN 压电薄膜的制备......................................32.1.2 PVDF 压电薄膜的制备....................................52.1.3 PZT 压电薄膜的制备......................................52.1.4.ZnO 压电薄膜的制备......................................62.1.5 KNN 基压电薄膜的制备...................................62.2 压电薄膜的应用研究...........................................72.2.1 压电薄膜传感器..........................................72.2.2 超声换能器件............................................92.2.3 声表面波器件...........................................102.2.4 微机电系统（MEMS）...................................103.结语....................................................12参考文献..................................................13致谢......................................................15摘 要介绍了压电薄膜的发展背景和研究意义，重点综述了 PZT、PVDF、ZnO、AlN以及 KNN 基压电薄膜的制备方法以及所取得的研究成果，并对压电薄膜的应用研究进行了论述，最后简单讨论了压电薄膜发展所面临的机遇和挑战。关键词： 压电薄膜；制备方法；应用研究IAbstractThis paper introduces the development background and research significance of piezoelectric thin films, mainly summarizes the preparation methods and research achievements of PZT, PVDF, ZnO, AlN and KNN based piezoelectric thin films, and discusses the application research of piezoelectric t...
