IEST RP-CC004.3-2004原版完整文件VIP免费

INSTITUTEOFENVIRONMENTALSCIENCESANDTECHNOLOGYContaminationControlDivisionRecommendedPractice004.3IEST-RP-CCOo4.3EvaluatingWipingMaterialsUsedinCleanroomsandOtherControlledEnvironmentsINSTITIJTEOFENVIRoNMENTALSCIENCESANDTECHNOLoGY_____________ArlingtonPlaceOne2340S.ArlingtonHeightsRoad,SuiteIOOArlingtonHeights.IL60005-4516Phone:(847)98l-0l00∙Fax:(847)981-4130B=SlE-mail:iesi<84est.org♦Web:www.iest.org7”.CopyrightedCπw(e∕iatIxyrrnTEOFENVIRONMENTALSCIFKCES»NDTECIINOI.WJYIEST-KP-CC0043IECT-RP-CC1M.3IXKΠTITFOFEΛVIR(>K∖IFVΓM.SCIENCESAM>TECIIM)U>GYCgyN火MedO,m∕J"AMThisRecommendedPracticeispublishedbytheINSTITUTEOFENVIRONMENTALSCIENCESANDTECHNOL∞YtoadvanceIhctechnicalandcnginςχringsciences,hsuseisentirelyVOlUnIary,anddeterminationofitsapplicabilityandsuitabilityforanyparticularuseissolelytheresponsibilityoftheuser.TliisRccommendcclPracticewaspreparedbyandisunderthejurisdictionofWorkingGroup(XMoftheIESTContaminationControlDivision.Copyright©2(X)4bytheINSTITUTEOFENVIRONMENTALSCIENCESANDTECHNOLOGYFirstprinting.August2004ISBN978-1-877862-98-4PROPOSALFORIMPROVEMENT:TheWorkingGroupsOfIhCINSTITUTEorENVIRONMENTALSClENCESANDTECHNOLOGYarecontinuallyworkingonimprovementstotheirRecommendedPracticesandReferenceDocuments.Suggestionsfromthosewhousethesedocumentsarewelcome.Ifyouhaveasuggestionregardingthisdocument,pleaseusetheonlineProposalforImprovementformfoundontheIESTwebsiteatwww.iest.org/proposal/form.html.INSTITITTEOFENVlRo、、IEvrALSCIENCESΛNI>TECHNOLCM;YArlingtonPlaceOne2340S.ArlinglonHeightsRead.SuiteIOOArlingtonFleighlx.II.6(KK)5∙45∣6Phone：(M?)981-OlOO∙Fax:(847)981-4130E-mail：iesi9∙estθrg∙Web:www.iesi.orgCopyrightedCπw(e∕iatIxyrrnTEOFENVIRONMENTALSCIFKCES»NDTECIINOI.WJYIEST-KP-CC0043IESΓ-RP-<'C0(M3INynTerForEΛVIROV∖IEXΓAI.SCIENCESAKnTECIIM>U>GVCopyrightedDmaierkil5EvaluatingWipingMaterialsUsedinCleanroomsandOtherControlledEnvironmentsIEST-RP-CC004.3CONTENTSSECTION1SCOPEANDLIMITATIONS.....................................................................................................................................72REFERENCES.........................................................................................................................................................73TERMSANDDEFINITIONS.....................................................................................................................................84BACKGROUNDANDPURPOSE.............................................................................................................................85RECOMMENDEDLABORATORYPRACTICES......................................................................................................96TESTSFORPARTICLES.......................................................................................................................................IO7TESTSFOREXTRACTABLEMATTER..................................................................................................................188TESTFORSORBENCYCAPACITYANDSORBENCYRATE...................................................................229METHODFoRQUANTIFYINGBK)BURDENONCONSUMABLES......................................................................2510TESTFORSTATIC....................................................................................................................................