US9111 Silicon Pressure Sensor 1 Ver. 1.0 Featu res Low Cost Gauge Version and Absolute Version Constant Current or Constant Voltage Drive High Output Wide Pressure Range Available from 1psi to 60psi Applications Medical Instrumentation Altimeter Weather Forecast Tire Gauge Pressure Gauge Industrial Sensor Home Appliances US9111 Silicon Pressure Sensor 2 Ver. 1.0 Specification Type of package DIP or SMT Pressure medium Dry air or non-corrosive gas Min Nominal Max Unit Excitation Voltage 5 10 V Excitation Current 1.00 2.00 mA Bridge Impedance 4 5 6 kΩ Span1 1 psi 20 30 40 mV 5.8 psi 40 70 100 mV 5.8 psi * 75 100 125 mV 15 psi 75 100 125 mV 15 psi ** 130 170 210 mV 30 psi 70 100 130 mV 60 psi 140 190 240 mV Offset -30 0 30 mV TC Span2 (Constant Voltage) -0.17 -0.22 -0.27 %FS/°C TC Span2 (Constant Current) -0.05 ±0.02 +0.05 %FS/°C TC Offset2 -0.08 -0.02 +0.08 %FS/°C Linearity3 -0.3 ±0.1 +0.3 %FS Hysteresis -0.3 ±0.1 +0.3 %FS Proof Pressure 2X Rated FS Burst Pressure 3X Rated FS Operating Temperature -40 125 °C Storage Temperature -55 150 °C 1 Unless otherwise specified, span is measured at 5.0V Constant Voltage supply at 25°C. 2 Unless otherwise specified, temperature coefficients are measured from 0°C to 50°C @ 5V Constant voltage excitation. 3 Defined as best straight line. * 5.8 psi high sensitivity type ** 15 psi high sensitivity type, linearity characterized at 700mbar and 1100mbar US9111 Silicon Pressure Sensor 3 Ver. 1.0 Pads Layout and Definition Tube type Ø3.010.168.58.53.72.542.54Pressure InletØ1.0R 0.5Ø1.0Pressure inlet2.542.54R 0.53.78.512356410.16Ø3.05-10°2.542.54Ø3.06.06.07.05-10°10.30.8Pressure inlet3.56.01235640.250.25Ø1.1123564DIP Top TubeDIP Bottom TubeSMTDetail A Unit: mm Pin Definition 1 Gnd 2 S+ 3 Ext 4 N/C 5 S- 6 Gnd US9111 Silicon Pressure Sensor 4 Ver. 1.0 Hole type 4.06 [0.160]5.08 [0.200]6.10 [0.240]0.51 [0.020]x45°0.71 [0.028]2.54 [0.100]2.79 [0.110]1.78 [0.070]1.27 [0.050]432156780.41 [0.016]1.27 [0.050]0.50 [0.020]4.35 [0.171]3.36 [0.132]1.76 [0.069]2.43 [0.095]3215641.38 [0.054]Ø1.00 [Ø0.039]Pressure InletØ0.76 [Ø0.030]Pressure Inlet7.80 [0.307]0.30 [0.012]0.10 [0.004]SO8SO6DETAIL A Unit: mm[in] SO6 Pin SO8 Gnd 1 N/C S- 2 S+ Ext 3 N/C N/C 4 Gnd S+ 5 Gnd Gnd 6 S- 7 N/C 8 Ext US9111 Silicon Pressure Sensor 5 Ver. 1.0 Hole type 2.542.547.010.30.83.51235640.250.250.50.8Pressure InletDetail ASMT SQUARE Unit: mm Pin Definition 1 Gnd 2 S- 3 Ext 4 N/C 5 S+ 6 Gnd Ordering Information US9111 Silicon Pressure Sensor 6 Ver. 1.0 US – 9111 - □ □ □ - □ 001 1 psi D DIP Top tube 006 5.8 psi U DIP Bottom tube H06 5.8 psi High sensitivity type S SMT Top tube 005 15 psi R SMT Hole H15 15 psi High sensitivity type 6 SO6 Hole 030 30 psi 8 SO8 Hole 060 60 psi
