精品文档---下载后可任意编辑三维微电子封装玻璃转接板的电磁仿真及其制备探究的开题报告【摘要】在现代电子技术的进展中，三维微电子封装技术越来越受到关注。其中，玻璃转接板(Glass Interposer, GI)是一种新兴的封装技术，逐渐成为日常生活中各种电子产品的重要组成部分。本文的讨论重点为玻璃转接板的电磁仿真及其制备探究。首先，通过对玻璃转接板的结构、特性和应用进行介绍，提出了讨论的动机和意义。其次，针对电磁仿真的需求，介绍了计算电磁学(Cellular Automata)方法的原理和优势，并对目前主流的电磁仿真软件进行了分析和比较，选择了 Ansys 进行具体的仿真计算。最后，探讨了玻璃转接板的制备技术，包括基板制备、沉积过程、刻蚀技术等方面。讨论结果将为三维微电子封装技术的进展提供有力的支持和指导，同时也有利于推动我国玻璃转接板工艺的讨论和进展。【关键词】三维微电子封装；玻璃转接板；电磁仿真；制备技术【Abstract】In the development of modern electronic technology, the three-dimensional microelectronic packaging technology has attracted more and more attention. Among them, Glass Interposer (GI) is an emerging packaging technology, gradually becoming an important part of various electronic products in daily life.The research focus of this paper is the electromagnetic simulation and preparation exploration of the glass interposer. First of all, the structure, characteristics and applications of the glass interposer are introduced, and the motivation and significance of the research are proposed. Secondly, in view of the need for electromagnetic simulation, the principle and advantages of cellular automata method are introduced, and the mainstream electromagnetic simulation software is analyzed and compared, and Ansys is selected for specific simulation calculation. Finally, the preparation technology of glass interposer is discussed, including substrate preparation, deposition process, etching technology and other aspects.精品文档---下载后可任意编辑The research results will provide strong support and guidance for the development of three-dimensional microelectronic packaging technology, and also help to promote the research and development of glass interposer technology in China.【Key Words】three-dimensional microelectronic packaging; glass interposer; electromagnetic simulation; preparation technology
