ZQJ-230D氦质谱检漏仪企业通过ISO9001质量管理体系认证ZQJ-230D型氦质谱检漏仪使用说明书目录第一部分仪器介绍1.1外观尺寸.................................................1-11.2仪器结构.................................................1-11.2.1质谱室..............................................1-31.2.1.1离子源.........................................1-31.2.1.2磁分析器.......................................1-41.2.1.3接收极与前置放大器.............................1-41.2.1.4全离子检测极...................................1-41.2.2真空系统............................................1-51.2.2.1机械泵.........................................1-51.2.2.2涡轮分子泵.....................................1-61.2.2.3组合阀.........................................1-71.2.2.4真空测量.......................................1-81.2.3电气系统............................................1-81.2.3.1电子机柜.......................................1-81.2.3.2操作台板......................................1-101.2.3.3电磁阀电源箱..................................1-121.3仪器主要性能参数.......................................1-131.4仪器使用环境条件.......................................1-131.5仪器成套性.............................................1-14第二部分使用方法.....................................2-12.1开箱...................................................2-12.2操作前准备.............................................2-12.3安装...................................................2-22.4操作...................................................2-22.4.1首次开机..........................................2-22.4.2氦峰调试与漏率校准................................2-32.4.3喷吹法检漏........................................2-62.4.3.1正常检漏操作(≤10Pa........................2-62.4.3.2高压检漏操作(10~20Pa......................2-72.4.3.3延长预抽时间..................................2-72.4.3.4超高压检漏(>20Pa...........................2-82.4.4吸枪检漏...........................................2-82.5停机....................................................2-92.5.1维持备用..........................................2-92.5.2完全停机.........................................2-10第三部分维护.......................................3-13.1漏率校准...............................................3-13.2真空维护与清洗.........................................3-1目录III3.2.1机械泵油面观测.....................................3-13.2.2更换机械泵油.......................................3-13.2.3分子泵加注润滑油...................................3-23.2.4清洗分子泵.........................................3-23.2.5清洗质谱室.........................................3-23.2.6更换离子源........................................3-113.2.7清洗组合阀........................................3-123.3电子部件调整...........................................3-133.3.1发射调节..........................................3-133.3.2离子源电压校正....................................3-133.3.3热偶规管调整......................................3-143.3.4过压保护调节......................................3-143.3.5分子泵启动设置....................................3-153.3.6漏率显示放大器调整................................3-153.3.7检查前置放大器供电................................3-153.4检验氦本底.............................................3-163.5仪器泄漏自检......................................
