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国电内蒙古晶阳能源有限公司 年产3000吨多晶硅项目 工程清洗技术要求 信息产业电子第十一设计研究院有限公司 2010年4月26日 1目 录 1、总则 ································································································- 1 - 2、执行规范和标准 ············································································- 1 - 3、本装置清洗等级的划分·································································- 2 - 4、本多晶硅装置的清洗工作范围·····················································- 4 - 5、施工方法 ························································································- 6 - 6、质量验收标准 ··············································································- 11 - 7、清洗安全注意事项·······································································- 12 - 8、清洗废液处理 ··············································································- 13 - 21 、总则 多晶硅是高纯半导体或光伏材料,多晶硅生产是一般以改良西门子法生产电子级（大部分）的多晶硅（纯度高达9~11个9）产品。项目工艺管道连接全厂的各种设备、系统，其制作安装工作繁杂、涉及面广、工程量巨大，直接影响着项目建设的高质、安全、如期的完成。针对该工作，将制定专门、分类的安装管理标准进行全流程的规范管理。本说明书是描述其中重要的清洗洁净工作的具体文件。 保证产品的高纯度质量，是本项目实施的根本。多晶硅工业生产中工艺设备、管道的...