精品文档---下载后可任意编辑AlGaN/GaN HEMT 空气桥技术讨论的开题报告Title: Research on Air-bridge Technology for AlGaN/GaN HEMTIntroduction:AlGaN/GaN HEMT (High Electron Mobility Transistor) is a type of semiconductor device that shows exceptional performance in high power and high frequency applications. However, the device reliability is often affected by the surface states and the related parasitic effects. The air-bridge technology has been developed to solve this problem by creating an isolation between the source/drain electrodes and the surface of the device.Objectives:The main objective of this research is to investigate the performance improvement and the reliability of the AlGaN/GaN HEMT with air-bridge technology. The specific objectives are:1. To fabricate the air-bridge AlGaN/GaN HEMT using standard semiconductor processing techniques.2. To characterize the device performance in terms of DC and AC characteristics.3. To investigate the effect of air-bridge technology on device reliability under various stress conditions.4. To compare the performance and reliability of the air-bridge AlGaN/GaN HEMT with the conventional device.Methods:The research will be carried out in several steps. First, the HEMT device will be designed and simulated using TCAD software. Then, the device will be fabricated using standard semiconductor processing techniques. The air-bridge technology will be implemented by etching a trench between the source/drain electrodes and the surface of the device, followed by deposition of a dielectric material. The electrical characteristics of the device will be measured using a semiconductor parameter analyzer. To investigate the reliability, the device will be subjected to various stress conditions, such as temperature, bias voltage and current, and 精品文档---下载后可任意编辑radiation. The performance of the air-bridge HEMT will be compared with the conventional device.Expected results:The research is expected to demonstrate the feasibility and advantages of air-bridge technology for AlGaN/GaN HEMT. The results will show improvement in device performance and reliability, indicating the potential for device applications in high power and high frequency electronics.Conclusion:The research on air-bridge technology for AlGaN/GaN HEMT is an innovative approach to improve device reliability and performance for high power and high frequency applications. This research will contribute to the development of new technologies for the semiconductor industry.
