精品文档---下载后可任意编辑倾斜溅射和 Nd 掺杂对 CoZr 薄膜高频软磁性能的影响的开题报告题目：倾斜溅射和 Nd 掺杂对 CoZr 薄膜高频软磁性能的影响的讨论摘要：本文将讨论倾斜溅射和 Nd 掺杂对 CoZr 薄膜高频软磁性能的影响。CoZr 合金具有良好的高频软磁性能，已广泛应用于电感器、变压器等领域。但是，其高频软磁性能仍有很大的提升空间。本文通过倾斜溅射技术制备 CoZr 薄膜，并在制备过程中掺入不同浓度的 Nd。使用 X射线衍射（XRD）、扫描电子显微镜（SEM）、维卡硬度测试仪等对样品进行表征。通过测试饱和磁感应强度（Bs）、谐振频率（fr）、损耗因子（tanδ）等性能参数，分析了倾斜溅射和 Nd 掺杂对 CoZr 薄膜高频软磁性能的影响。关键词：倾斜溅射；Nd 掺杂；CoZr 薄膜；高频软磁性能；饱和磁感应强度；谐振频率；损耗因子。Abstract: This paper will research the influence of inclined sputtering and Nd doping on the high-frequency soft magnetic properties of CoZr thin films. CoZr alloy has good high-frequency soft magnetic properties and has been widely used in inductors, transformers and other fields. However, there is still much room for improvement in its high-frequency soft magnetic properties. In this paper, CoZr thin films were prepared by inclined sputtering technology, and Nd was added at different concentrations during the preparation process. The samples were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), Vickers hardness tester, etc. By testing performance parameters such as saturation magnetic induction intensity (Bs), resonance frequency (fr), and loss factor (tanδ), the influence of inclined sputtering and Nd doping on the high-frequency soft magnetic properties of CoZr thin films were analyzed.Keywords: inclined sputtering; Nd doping; CoZr thin film; high-frequency soft magnetic performance; saturation magnetic induction intensity; resonance frequency; loss factor.
