掺磷硅的电阻率(ρ p)、掺硼磷或硼掺杂浓度ρ pρ bρ pρ bρ pρ bρ p(cm-3)1.E+124.30E+031.30E+043.90E+031.20E+043.60E+031.10E+043.30E+032.E+122.10E+036.50E+032.00E+036.20E+031.90E+035.90E+031.90E+033.E+121.40E+034.30E+031.40E+034.20E+031.30E+034.10E+031.30E+034.E+121.10E+033.30E+031.00E+033.20E+031.00E+033.10E+039.90E+025.E+128.50E+022.60E+038.30E+022.60E+038.20E+022.50E+038.00E+026.E+127.10E+022.20E+037.00E+022.10E+036.90E+022.10E+036.70E+027.E+126.10E+021.90E+036.00E+021.80E+035.90E+021.80E+035.80E+028.E+125.30E+021.60E+035.20E+021.60E+035.20E+021.60E+035.10E+029.E+124.70E+021.50E+034.70E+021.40E+034.60E+021.40E+034.60E+021.E+134.30E+021.30E+033.90E+021.20E+033.50E+021.10E+033.30E+022.E+132.10E+026.50E+022.00E+026.20E+021.90E+025.90E+021.80E+023.E+131.42E+024.35E+021.37E+024.21E+021.33E+024.08E+021.29E+024.E+131.07E+023.27E+021.04E+023.19E+021.02E+023.11E+029.92E+015.E+138.53E+012.61E+028.37E+012.56E+028.21E+012.51E+028.05E+016.E+137.12E+012.18E+027.00E+012.14E+026.89E+012.11E+026.78E+017.E+136.11E+011.87E+026.02E+011.84E+025.94E+011.82E+025.86E+018.E+135.35E+011.64E+025.28E+011.62E+025.22E+011.60E+025.16E+019.E+134.76E+011.45E+024.71E+011.44E+024.66E+011.42E+024.61E+011.E+144.29E+011.31E+023.90E+011.19E+023.58E+011.09E+023.31E+012.E+142.16E+016.56E+012.06E+016.25E+011.97E+015.97E+011.88E+013.E+141.45E+014.38E+011.40E+014.24E+011.36E+014.11E+011.32E+014.E+141.09E+013.29E+011.07E+013.21E+011.04E+013.14E+011.02E+015.E+148.79E+002.64E+018.62E+002.59E+018.46E+002.54E+018.30E+006.E+147.36E+002.20E+017.24E+002.17E+017.12E+002.13E+017.01E+007.E+146.33E+001.89E+016.24E+001.87E+016.16E+001.84E+016.08E+008.E+145.56E+001.66E+015.50E+001.64E+015.43E+001.62E+015.37E+009.E+144.96E+001.48E+014.91E+001.46E+014.86E+001.44E+014.81E+001.E+154.48E+001.33E+014.09E+001.21E+013.76E+001.11E+013.48E+002.E+152.31E+006.74E+002.20E+006.42E+002.11E+006.14E+002.02E+003.E+151.57E+004.54E+001.53E+004.40E+001.48E+004.26E+001.44E+004.E+151.20E+003.44E+001.18E+003.36E+001.15E+003.28E+001...
