0四探针操作手册|四探针操作说明书第1章引言..............................................................................................................................11.目的..................................................................................................................................12.应用范围..........................................................................................................................13.测试设备..........................................................................................................................1四探针......................................................................................................................1数字电压源表..........................................................................................................2第2章原理简述......................................................................................................................31.薄膜(厚度≤4mm)电阻率:............................................................................................32.薄膜方块电阻..................................................................................................................3第3章操作方法......................................................................................................................51.引言..................................................................................................................................52.测试线连接方式..............................................................................................................53.KEITHLEY2400高压源表设置指南..................................................................................64.探针接触方式..................................................................................................................85.数据测试指南..................................................................................................................8第4章注意事项....................................................................................................................10附表...................................................................................................................................................I第1章引言1.目的本说明书主要介绍用四探针法测试薄膜方块电阻及电阻率的原理及具体操作方法。2.应用范围测量参数:方块电阻,电阻率测量样品:均匀薄膜,均匀薄片方块电阻测试范围:0.01Ω~500MΩ电阻率测试范围:10-5Ω∙cm~103Ω∙cm样品大小:直径>1cm精度:<±5%3.测试设备四探针生产厂商:广州四探针有限公司RTS-2型基本指标:间距:1±0.01mm;针间绝缘电阻:≥1000MΩ;机械游移率:≤0.3%;探针:碳化钨或高速钢材质,探针直径Ф0.5mm;探针压力:5~16牛顿(总力);使用环境:温度::23±2℃;相对湿度:≤65%;无高频干扰;无强光直射;1基本参数:Fsp=0.1探针间距:1.0mm数字电压源表生产厂商:KEITHLEY2400高压源表技术参数:准确度:0.012%功率:20w型号:2400品牌:吉时利测量范围:可选高电压(1100V)或大电流(3A)源/测量(A)KEITHLEY2400通用型源表,最大可测量200V的电流和1A的电流,输出功率20W.主要特点及优点:设计用于高速直流参数测度2400系列提供宽动态范围:10pAto10A,1μVto1100V,20Wto1000W四象限工作0.012%的精确度,51/2的分辨率可程控电流驱动和电压测量钳位的6位线电阻测量在41/2数位时通过GPIB达1700读数/秒内置快速失败/通过测试比较器可选接触式检查功能数字I/O提供快速分选与机械手连接GPIB,RS-232,和触发式连接面板Tes...