1 1 单粒两点纠偏 ................................................................................... 2 1.1 打开软件............................................................................................................................. 2 1.2 相机标定............................................................................................................................. 2 1.3 打开文件............................................................................................................................. 4 1.4 设置图层............................................................................................................................. 5 1.5 图档分块............................................................................................................................. 5 1.6 相机靶标的设置 ................................................................................................................. 6 1.7 设置纠偏点 ......................................................................................................................... 6 1.8 对标 .................................................................................................................................... 9 1.9 放置产品........................................................................................................................... 10 1.10 相机测偏......................................................................................................................... 10 1.11 产品偏差计算 ................................................................................................................. 11 1.12 产品的蚀刻..................................................................................................................... 13 2 大片四点纠偏 ................................................................................. 15 2.1 打开软件.....................................................................
