精品文档---下载后可任意编辑微陀螺仪的设计与制造学校：华中科技大学专业：机械设计制造及其自动化姓名：潘登班级：1104 班学号：U9指导老师：廖广兰来五星中文摘要精品文档---下载后可任意编辑随着科学技术的进展以及科研技术的逐渐成熟。陀螺仪也逐渐进入了各个领域。现如今陀螺仪在航海导航、航天航空、讨论动力学、兵器、汽车、生物医学、环境监控等方面有了广泛的应用。而各种陀螺仪也因其原理的不同而有不同的分类，诸如哥氏加速度效应微振动陀螺、流体陀螺、固体微陀螺、悬浮转子式微陀螺、微集成光学式陀螺以及原子陀螺。而其中随着 MEMS 技术的不断进展，以其为基础的微陀螺因尺寸小、精度高、重量轻、易于数字化、智能化而越来越受到大家青睐。其在汽车导航、消费电子和移动应用等民用领域以及现代和可预见的未来高科技战场上拥有宽阔的进展和市场前景。 文章首先对陀螺仪做了简单的原理和功能介绍，阐述了当前微陀螺仪是非常具有前景的讨论防线，并简单介绍了几种常见的微陀螺仪，然后对微陀螺仪的结构进行了简单的分析并且分析了微机械陀螺仪的设计及制造过程和工艺方法并对其中的技术难点进行了分析，也对加工陀螺仪必须的 MEMS 工艺进行了概述，然后对微陀螺仪的前景及应用进行了进一步的探讨。关键词：微机械陀螺仪，MEMS 工艺，制作过程，关键技术精品文档---下载后可任意编辑Abstract With the development of science and technology as well as scientific research and technology matures. Gyroscope is gradually coming into the fields. Now gyroscope has broad application in marine navigation, aerospace, research dynamics, weapons, cars, bio-medicine, environmental monitoring, etc. And also because of the various gyroscope different principles and have different classifications, such as the Coriolis acceleration effect of micro-vibration gyro, gyro fluid, solid micro-gyroscope, suspended gyroscope rotor micro, micro-gyroscope integrated optical and atomic gyroscope. With the continuous development of which MEMS technology, with its micro-gyroscope-based due to the small size, high precision, light weight, easy-to-digital, intelligent and increasing...
