Crankshaft three degrees of freedom use the same parallel micro-mechanical structure of the experimental designAbstract: Crankshaft in mechanical structure design of the small general has been replaced mechanical connection and extensive use. However, the wrong model will be reduced Crankshaft precision mechanical structure. In this paper, in order to get the correct model Crankshaft and design of a 3-DOF planar the same type of micro-mechanical structure. To that end, an initial analysis of kinematics including inverse kinematics, internal kinematics and coordination of the work of a fixed model has been raised. First of all, take into account a freedom Crankshaft cycle type, but FEM based on the simulation results is inconsistent with the analysis of the results. This is because small axial direction along the connecting rod extended to hinder the accuracy of the mechanical connection. To address this problem, including an additional sports bodies such as the prism connecting the two degree of freedom model Crankshaft has already begun to use some. According to this model, ensure the accuracy of the mechanical structure. Through simulation and test showed that the accuracy of this model is effective. This work emphasized the model Crankshaft Crankshaft guarantee the accuracy of the micro-mechanical structure tied to the use of great significance.Ⅰ、IntroductionMicro-mechanical devices in many areas is a key and essential techniques, such as scanning electron microscopy, X-ray lithography, mask alignment and micro-machinery. Recently, a lot of Crankshaft on the use of micro-mechanical structure of the analysis and experimental research. The majority of previous studies (Moriyama [1], [2], such as Taniguchi, T...
