14644-1:2015(E)北京齐力佳提供禁止未及授权使用、短印、放上网页分享1/58ISO14644-1Cleanroomsandassociatedcontrolledenvironments洁净室和相关的受控环境Part1:第一部分:Classificationofaircleanlinessbyparticleconcentration通过粒子浓度对空气洁净度进行分级第二版本2015-12-1514644-1:2015(E)2/58Contents目录Foreword前言Introduction介绍1Scope范围2Normativereferences标准参考3Termsanddefinitions
术语和定义3
1General概述3
2Airborneparticles空气悬浮粒子3
3Occupancystates使用状态3
4Testinginstrumentation(seeAnnexF)测试仪器(参见附录E)3
5Instrumentspecifications仪器规格4Classification级别4
1Occupancystate(s)使用状态4
2Particlesize(s)粒径4
3ISOClassnumberISo级别编号4
4Designation
5Intermediatedecimalcleanlinessclassesandparticlesizethresholds中间洁净级别和粒径阈值5Demonstrationofcompliance符合性证明5
1Principle原则5
2Testing测试5
3Airborneparticleconcentrationevaluation空气悬浮粒子浓度评估5
4Testreport测试报告AnnexA(normative)Referencemethodforclassi