14644-1:2015(E)北京齐力佳提供禁止未及授权使用、短印、放上网页分享1/58ISO14644-1Cleanroomsandassociatedcontrolledenvironments洁净室和相关的受控环境Part1:第一部分：Classificationofaircleanlinessbyparticleconcentration通过粒子浓度对空气洁净度进行分级第二版本2015-12-1514644-1:2015(E)2/58Contents目录Foreword前言Introduction介绍1Scope范围2Normativereferences标准参考3Termsanddefinitions.术语和定义3.1General概述3.2Airborneparticles空气悬浮粒子3.3Occupancystates使用状态3.4Testinginstrumentation(seeAnnexF)测试仪器（参见附录E）3.5Instrumentspecifications仪器规格4Classification级别4.1Occupancystate(s)使用状态4.2Particlesize(s)粒径4.3ISOClassnumberISo级别编号4.4Designation.名称指定4.5Intermediatedecimalcleanlinessclassesandparticlesizethresholds中间洁净级别和粒径阈值5Demonstrationofcompliance符合性证明5.1Principle原则5.2Testing测试5.3Airborneparticleconcentrationevaluation空气悬浮粒子浓度评估5.4Testreport测试报告AnnexA(normative)Referencemethodforclassificationofaircleanlinessbyparticleconcentration附录A（标准文件）采用粒子浓度对空气洁净度分级的参考方法AnnexB(informative)Examplesofclassificationcalculations附录B（仅供参考）分级计数举例AnnexC(informative)Countingandsizingofairbornemacroparticles附录C（仅供参考）空气大粒子计数和粒径测量AnnexD(informative)Sequentialsamplingprocedure附录D（仅供参考）顺序取样法AnnexE(informative)Specificationofintermediatedecimalcleanlinessclassesandparticlesizethresholds附录E（仅供参考）中间洁净级别和粒径阈值标准AnnexF(informative)Testinstruments附录F（仅供参考）测试仪器Bibliography文献Foreword前言ISO(theInternationalOrganizationforStandardization)isaworldwidefederationofnationalstandardsbodies(ISOmemberbodies).TheworkofpreparingInternationalStandardsisnormallycarriedoutthroughISOtechnicalcommittees.Eachmemberbodyinterestedinasubjectforwhichatechnicalcommitteehasbeenestablishedhastherighttoberepresentedonthatcommittee.Internationalorganizations,14644-1:2015(E)3/58governmentalandnon-governmental,inliaisonwithISO,alsotakepartinthework.ISOcollaboratescloselywiththeInternationalElectrotechnicalCommission(IEC)onallmattersofelectrotechnicalstandardization.ISO(国际标准化组织)为全球各国标准化团体的联合会(ISo会员团体)。其国际标准工作一般是由ISO各技术委员公执行。每个会员团体若对技术委员公的某一课题感兴趣，均有权作为此技术委员会的代表。任何与ISo保持联系的国际组织，无论是政府的还是非政府的组织，同样可参加此项工作。ISo与国际电气技术委员会(IEC)在电气技术标准化方面进行紧密合作。TheproceduresusedtodevelopthisdocumentandthoseintendedforitsfurthermaintenancearedescribedintheISO/IECDirectives,Part1.InparticularthedifferentapprovalcriterianeededforthedifferenttypesofISOdocumentsshouldbenoted.ThisdocumentwasdraftedinaccordancewiththeeditorialrulesoftheISO/IECDirectives,Part2(seewww.iso.org/directives).该程序用来开发本文件并且意图对其进一步的维护，这些在ISO/IEC指示的第部分有所描述。尤其是应注意不同的审批标准所需的不同类型的ISe)文件。该文件是按照ISO/IEC第二部分的编辑规则进行起草(参见WWW.iso.org/directives)。Attentionisdrawntothepossibilitythatsomeoftheelementsofthisdocumentmaybethesubjectofpatentrights.ISOshallnotbeheldresponsibleforidentifyinganyorallsuchpatentrights.DetailsofanypatentrightsidentifiedduringthedevelopmentofthedocumentwillbeintheIntroductionand/orontheISOlistofpatentdeclarationsreceived(seewww.iso.org/patents).该文件的某些元素可能被吸弓I注意的可能是一些专利权...
