1.11□[□□□□□□□□□□□□□□□a](EMO)□□□□□□□□□□□1.12□□□□□□□□□□□□□□□□□□□□□□□□□□□a1.13□□□□□□□□□□□□□a1.14□□□□□□□□□□□□□□□□□□a(□0.003pm)U1.15□□□□□□□□□□□□□□□□□□□□□□a1.16GCDVMB叮叮口Z—PURGE叮口1.17GCDVMBM叮叮叮叮叮叮叮GCD□800D□□□57□□F5叮叮叮叮口□□□□□□□□□□□1.1GG叮叮叮叮叮叮+□□□□□□□□1.2VMB叮叮叮□□□□□□□□□+PLCDDDDD□□□□PCB叮□□□□1.3GCDVMB叮叮叮叮叮口2.5mmU1.4□□□□□□□□□□□□□□1.5□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□1.6□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□□6.5mm叮叮叮叮叮叮叮1.7□□□□□□□□□□□□□□□6叮叮叮叮叮叮叮口□□□□□□1.8□□□□□□□□□□□□□□N2叮叮口1.9□□□□□□□□□□68叮叮叮叮叮叮叮叮叮口□□□□□□□□□□□□□□□□□□a□□GC叮叮GasDDDDCL2-BCL3SiCL4-HFStyleDD-DDDDDDGCGCEquipmentNO.DDDD11linesizeDDDD1/41/4OperationDDSemiAutoSemiAutoProcessCylinders1CL2+1BCL31SiCL4+1HF1.10□□□□□□□□□□□□□□□□□□□□□□□□□□2160叮口VMB叮640叮叮380叮叮1850叮口DDDDDDDProcessmaterialDDDDDDSS316LEPSS316LEPProcesslineDDDDDDAutoSwitchMethodDDDDDDWeightWeightWeightUnitDDDDYesYesPanellineHeatTraceDDDDDDDDBCL3YesCylinderheatingjacketDDDDDBCL3YesOneStepRegulatorDDDDDYesYesHighPressureLeakTest(HPLT)DDDDDDN/AN/AVacuumGeneratorDDDDDYesYesDDDDDDDEnclosureDDCabinetCabinetExcessFlowSwitchDDDDCL2N/AAccessWindowODDYesYesDoorCloserODDYesYesDoorLatchingDDYesYesThreeStatusLamps(Red:ShutDown)(Yellow:Warning)(Green:Normai)DDDDDDDYesYesManometerSwitchGaugeDDDDDDDYesYesExhaustfaultalarmDDDDDDYesYesSprinklerDDDDDYesN/ATemperatureAlarmDDDDYesYesExhaustmanualdamperDDDDDDYesYes□□VMB□□□□GasDDDDSiH4NH3BCL3CL2StyleDDVMBVMBVMBVMBEquipmentNo.DDDD1111OperationDDSemi-AutoSemi-AutoSemi-AutoSemi-AutoProcessmaterialDDDDDDSS316LEPSS316LEPSS316LEPSS316LEPProcesslineDDDDDDMainlinesizeDD-DDDD1/4"1/4"1/4"1/4"SticklinesizeDDDD1/4"1/4"1/4"1/4"InletExpansionValveDDDDDYesYesYesYesInletPressureMonitorDDDDDDPGPGPGPGInletRemoteshutdownDDDDDDDDDYesYesYesYesStickPneumaticvalveDDDDDNONONONOStickPneumaticvalveDDDDDYesYesYesYesStickRegulatorDDDDDYesYesYesYesStickPressureMonitorDDDDDDPGPGPGPGStickPurgelineDDDDYesYesYesYesDDDDDDDPLCControllerPLCODDYesYesYesYesControllerZPurgeODDZDDYesYesYesYesEMODDDDDDYesYesYesYesRemoteESOinputDDDDDDDDDDYesYesYesYesShutdownAlarmoutputDDDDYesYesYesYesEnclosureDDBoxBoxBoxBoxDoorCloserODDYesYesYesYesDoorLatchingDDYesYesYesYesSafetyglassODDYesYesYesYesManometerSwitchGaugeDDDDODDYesYesYesYesE.M.ODDDDDDYesYesYesYesThreeStatusLamps(Red:ShutDown)(Yellow:Warning)(Green:Normai)DDDDODDYesYesYesYes□□□□□□□□□DiaphragmValveDDKITZ/AptechRegulatorODDAptech/PARKERCheckValveODDSwagelok/FujikinVacuumGeneratorDDDDDTK/AptechEFSDDDDDSwagelok/AptechPressureGaugeODDNKS/WIKAFilterODDEntegris/PallTubeDDValex/KUZEFittingDDFujikin/SwagelokPressureTransducerDDDDDNAGANO/WIKATouchScreenODDPro-facePLCODDOMRON6.2□□□□□□6.1GC叮StniAuhControlhrSemiAutoController/\HEATINGBLANKET02BCU/—-4J丿VMB叮SemiAutoCont「ol商
