精品文档---下载后可任意编辑Ti 及 TiMo 薄膜中氦的热处理讨论的开题报告Title: Investigation of Helium Thermal Treatment in Ti and TiMo Thin FilmsIntroduction:Titanium (Ti) and its alloys are widely used in various industrial and biological applications due to their excellent mechanical, corrosion, and bio-compatibility properties. However, the exposure to high-energy particles, such as neutrons in nuclear reactors, can cause damage to the structural integrity of Ti-based materials due to the accumulation of helium (He) within the metal lattice. The formation of He bubbles and micro-voids can lead to a decrease in mechanical strength and ductility of these materials. Therefore, understanding the thermal behavior of He in Ti-based materials is of great interest.Recent studies have shown that the addition of molybdenum (Mo) to Ti can significantly improve its radiation resistance by suppressing the formation of He bubbles. However, the exact mechanism behind the suppressive effect of Mo is not clear yet. Thus, the objective of this research project is to investigate the thermal behavior of He in Ti and TiMo thin films.Research Methodology:The following research methodology will be employed to achieve the research objective:1. Fabrication of Ti and TiMo thin films: Ti and TiMo thin films will be fabricated using magnetron sputtering on Si wafer substrates.2. Helium implantation: An ion implanter will be used to introduce He ions into the Ti and TiMo thin films at different doses and energies.3. Thermal treatment: The He-implanted Ti and TiMo thin films will be subjected to thermal treatment at different temperatures and durations using a rapid thermal annealing (RTA) system.4. Characterization: The thermal behavior of He in Ti and TiMo thin films will be investigated using various 精品文档---下载后可任意编辑characterization techniques such as Rutherford backscattering spectrometry (RBS), transmission electron microscopy (TEM), and X-ray diffraction (XRD).Expected Outcomes:This research project is expected to provide insights into the thermal behavior of He in Ti and TiMo thin films, which will enable the development of radiation-resistant Ti-based materials for various industrial and nuclear applications. Additionally, this research will shed light on the mechanism of the suppressive effect of Mo on He bubble formation in TiMo alloys.Conclusion:Understanding the behavior of He in Ti-based materials is vital for the development of radiation-resistant materials used in nuclear applications. The addition of Mo to Ti can significantly improve its radiation resistance, and this research will investigate the suppressive effect of Mo on He bubble formation. The results of this research will contribute to the development of advanced materials with improved properties, enabling safe and efficient use of nuclear energy.