北京信息科技大学《专业综合实践》报告题目激光干涉微位移测量系统设计学院仪器科学与光电工程专业光信息科学与技术学号2011010736、744、750、728姓名邓伟壮、潘晗、张驰、贾希冉指导老师日期2015.1目录题目激光干涉微位移测量系统设计.......................................................................................1目录..................................................................................................................................................2一、方案要求...................................................................................................................................31、设计内容.............................................................................................................................32、设计目标.............................................................................................................................33、设计预计实现目标.............................................................................................................3二、方案调研及原理.......................................................................................................................31、光学微位移测量的几种方法.............................................................................................3（1）光外差法.................................................................................................................3（2）电镜法.....................................................................................................................3（3）激光三角测量法.....................................................................................................4（4）干涉法测量.............................................................................................................42、光电接收器件...................................................................................................................4（1）光敏电阻.................................................................................................................4（2）PIN光电二极管......................................................................................................4（3）利用PIN光电二极管检查光信号.........................................................................6三、测量系统设计...........................................................................................................................81、整体电路设计...................................................................................................................82、光路部分...........................................................................................................................83、电路部分设计.................................................................................................................10（1）前置放大电路（电流/电压转换）...................................................................10（2）电压跟随器（电压稳定）.................................................................................11（3）去直流电路（高通滤波）.................................................................................11（4）滤波电路（低通滤波）.....................................................................................12（5）两级放大电路（5~50倍放大）........................................................................12（6...
