北京信息科技大学《专业综合实践》报告题目激光干涉微位移测量系统设计学院仪器科学与光电工程专业光信息科学与技术学号2011010736、744、750、728姓名邓伟壮、潘晗、张驰、贾希冉指导老师日期2015.1目录题目激光干涉微位移测量系统设计.......................................................................................1目录..................................................................................................................................................2一、方案要求...................................................................................................................................31、设计内容.............................................................................................................................32、设计目标.............................................................................................................................33、设计预计实现目标.............................................................................................................3二、方案调研及原理.......................................................................................................................31、光学微位移测量的几种方法.............................................................................................3(1)光外差法.................................................................................................................3(2)电镜法.....................................................................................................................3(3)激光三角测量法.....................................................................................................4(4)干涉法测量.............................................................................................................42、光电接收器件...................................................................................................................4(1)光敏电阻.................................................................................................................4(2)PIN光电二极管......................................................................................................4(3)利用PIN光电二极管检查光信号.........................................................................6三、测量系统设计...........................................................................................................................81、整体电路设计...................................................................................................................82、光路部分...........................................................................................................................83、电路部分设计.................................................................................................................10(1)前置放大电路(电流/电压转换)...................................................................10(2)电压跟随器(电压稳定).................................................................................11(3)去直流电路(高通滤波).................................................................................11(4)滤波电路(低通滤波).....................................................................................12(5)两级放大电路(5~50倍放大)........................................................................12(6...