本科学生毕业论文真空精密工作台结构设计系部名称：机电工程学院专业班级：机械设计自造及其自动化07-9班学生姓名：指导教师：陈佳莹职称：讲师黑龙江工程学院二○一一年六月TheGraduationThesisforBachelor'sDegreeTheStructureDesignofVacuumPrecisionWorktableCandidate：GeLipengSpecialty：MechanicalDesignandManufucture&AtuomationClass：07—09Supervisor：HeilongjiangInstituteofTechnology2011-06·Harbin黑龙江工程学院本科生毕业设计摘要光刻机工作时所要达到得很高的精度，对机械系统的传动机构和导轨都有很高的要求，因此，一般的滑动导轨的丝杠都不能满足这些要求。基于此，本课题采用了具有高精度，高平稳性的空气轴承来代替传统的导轨，传动件则采用精度很高的滚珠丝杠，以滚动代替普通丝杠滑动来提高精度，从而保证光刻机的加工精度。兼之电子束正常工作时的高真空度给抽真空和密封上带来的高难要求，本课题在设计中力求减少真空体积，并采用蛇皮管提出解决方案。本课题主要解决了以上问题，故本文主要以总体设计，滚珠丝杠，空气轴承三部分来介绍。本系统结构简单合理，运行可靠，操作简易完全，无污染，易于使用。关键词：导轨；空气轴承；滚珠丝杠；真空；-I-黑龙江工程学院本科生毕业设计ABSTRACTBecausethehighprecisionthatphotoetchingmachinemustachievewhenworkingposesahighstandardforthegearingandguideofmechanicalsystem,neitherordinaryslidingguidenorguidescrewisabletomeetthesedemands.Therefore,inthissubject,theauthoradoptsairbearingwithhighprecisionandstabilitytoreplacethetraditionalguideanduseshallguidescrewastransmissionpartwhichisrollinginsteadofslidinggenerallyadoptedbyordinaryguidescrewtoimproveprecision,thusguaranteestheprocessingprecisionofphotoetchingmachine.Meanwhile,thehighvacuumdegreedemandedbyelectronbeamtoworknormallybringsmanydifficultiestovacuumpumpandsealing.Theauthorstrivestodecreasevacuumvolumewhendesigningthesubjectandadoptsflexibleconduittoproposeasolution.Thispaperisjusttosolvetheabove-mentionedproblemsandisintroducedasfollowsgeneraldesign,ballguidescrewandairbearing.Thissystemhasasimpleandreasonablestructure,reliablefunction,easyandcompleteoperationandnopollution,thus,itiseasytoadoptthissystem.Keywords:Guide;AirBearing;BallGuideScrew;Vacuum;-II-黑龙江工程学院本科生毕业设计目录摘要······························································ⅠAbstract···························································Ⅱ第1章绪论·······················································111.1可控式室内微型移动小车···········································111.2可控式室内微型移动小车的分类·····································111.3国内外研究现状及发展趋势········································12第2章机械部分设计··············································132.1设计任务··················································132.2确定机械传动方案················································132.3直流伺服电动机的选择·········································142.4联轴器的选择············································172.5蜗...
