DRF-85型单晶炉使用说明书（电气部分）目录-.TDR-ADC单晶炉电气控制系统组成..............................................41.概述..........................................................................42.TDR-ADC电气控制系统组成及功能...............................................52.1TDR-ADC晶体生长控制柜..................................................62.1.1TDR-SLCL(PLC)晶升蜗升速度控制单机................................62.1.2TDR-SRCR晶转蜗转速度控制单机....................................62.1.3TDR-TEMP½1度控制及工控机单机....................................72.1.4控制柜继电控制单元.................................................82.1.5控制柜面板.........................................................82.2加热功率部件.................................................................82.2.1主加热功率部件.........................................................82.2.2辅助加热功率部件(选件).............................................92.3继电控制.................................................................92.3.1液压系统的继电控制.................................................92.3.2真空机组的继电控制.................................................92.4辅助控制部分.............................................................92.4.1HX-TDR主机分线盒接口装置.........................................92.4.2HX-SEED2引晶装置................................................102.4.3TDR-LIN晶升坍升计长板...........................................102.4.4限位开关..........................................................102.4.5冷却水温度测量....................................................112.4.6晶体直径测量......................................................113.TDRF-85炉的TDR-ADC也气控制系统接线说明...................................113.1TDRF-85炉的晶体生长控制柜接线说明......................................113.1.1控制柜内元件接线..................................................113.1.2控制柜端子排接线..................................................11一.TDR-ADC单晶炉电气控制系统安装调试..........................................231.安装说明......................................................................231.1控制系统配置............................................................231.1.1TDR-ADC晶体生长控制柜...........................................231.1.2加热功率部件......................................................241.2接线说明................................................................241.2.3主机分线盒接线说明..................................................252.系统调试.....................................................................252.1TDR-ADC晶升蜗升速度系统调试...........................................252.1.1晶升速度调试......................................................292.1.2堪升速度调试......................................................312.2.1晶转堪转速度交流伺服电机简介......................................342.2.2晶转期转速度调试..................................................352.3.1TDR-TEMP⅛度控制及工控机单机....................................362.3.3加热温度控制部分调试..............................................412.4TDR-ADC继电控制调试..................................................422.4.1真空机组继电控制调试..............................................422.4.2液压系统的继电控制调试............................................432.5TDR-ADC...
